注入能量对硅片的表面性能影响的研究
- Affiliation of Author(s):外国语言文化学院
- Funded by:省教育厅社科项目
- First Author:tangshuzhe
- Indexed by:Journal paper
- Document Code:paper_101400
- Volume:117;1;77-83
- ISSN No.:1002-5162
- Translation or Not:no
- CN No.:11-1158/K
- Date of Publication:2017-03-01
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