Research Focus

Current position: Home > Research Focus

Industrial Carbon Management and Semiconductor Industry Emission Reduction

Research Focus:
Focusing on greenhouse gas emission issues in semiconductor manufacturing processes, systematically conducting research on emission reduction technologies for high-global warming potential gases such as fluorinated compounds (PFCs) and N₂O, as well as developing carbon footprint accounting methodologies. The research encompasses the full-chain carbon management spectrum including carbon emission monitoring, data verification, emission reduction technology assessment, and carbon tax policy response, driving the semiconductor industry's transition toward net-zero emissions.

Key Technologies:

  • Emission Reduction Technologies: Optimizing process parameters and introducing abatement equipment for PFC and N₂O emissions from semiconductor etching and cleaning processes, achieving a combination of source reduction and end-of-pipe treatment.

  • Carbon Accounting Methodologies: Developing carbon emission accounting methods compliant with ISO 14064 and ISO 14067 standards, establishing standardized operating procedures (SOPs) for internal corporate monitoring and management.

  • Carbon Tax Management: Researching the impact of Singapore's carbon tax policy on corporate operations, formulating carbon cost optimization strategies, and completing multiple NEA carbon tax-related audits.

Representative Achievements:

  • Led energy-saving and emission reduction projects in semiconductor fabs, achieving annual CO₂e emission reductions of over 70,000 tonnes per company, generating economic benefits exceeding SGD 1 million annually.

  • Recognized as a Singapore National Environment Agency (NEA)-accredited carbon management expert for the semiconductor industry, participating in the accreditation of third-party verification bodies by the carbon pricing regulatory authority.

  • Published over 10 academic papers related to carbon emission management, and supervised multiple graduate students in completing carbon management research projects.