一种MEMS甲烷传感器及其应用和制备方法

• Disigner of the Invention:丁恩杰,刘正杰,liuxiaowen,zhaoxiaohu
• Type of Patent:国内
• State of Patent:专利授权
• Application Number:201410606852.5
• Number of Inventors:5
• Service Invention or Not:no
• Application Date:2014-10-31
• Authorization Date:2018-03-02
• First Author:mahongyu