基于硅加热器的MEMS甲烷传感器及其制备方法与应用

• Disigner of the Invention:秦顺利,王丽影
• Type of Patent:国内
• State of Patent:专利授权
• Application Number:201410607093.4
• Number of Inventors:3
• Service Invention or Not:no
• Application Date:2014-10-31
• Authorization Date:2017-05-31
• First Author:mahongyu