Cantilever­type microheater fabricated with thick silicon

• Affiliation of Author(s):化工学院
• Funded by:国家科技部
• First Author:mahongyu
• Co-author:dingenjie
• Indexed by:Journal paper
• Document Code:paper_99225
• Volume:21;4;
• ISSN No.:0946­7076
• Translation or Not:no
• Date of Publication:2015-04-22