Cantilever-type microheater fabricated with thick silicon

• Affiliation of Author(s):化工学院
• Funded by:国家科技部
• First Author:mahongyu
• Co-author:dingenjie
• Indexed by:Journal paper
• Document Code:paper_94959
• Volume:20;6;
• ISSN No.:1432-1858
• Translation or Not:no
• Date of Publication:2014-08-28