Paper Publications
Self-heating U-shaped Cantilever Silicon Microheater for Gas Sensor
- Affiliation of Author(s):化工学院
- Funded by:国家科技部
- First Author:mahongyu
- Co-author:王文娟,dingenjie,zhaoxiaohu,chengtingting
- Indexed by:会议论文
- Document Code:paper_92136
- Translation or Not:no
- Date of Publication:2013-11-03