TCR sign variation of surface micromachined polysilicon resistor under joule self-heating

• Affiliation of Author(s):化工学院
• Funded by:国家科技部
• First Author:mahongyu
• Indexed by:Journal paper
• Document Code:paper_88848
• Volume:136;1;99-105
• ISSN No.:1058-4587
• Translation or Not:no
• Date of Publication:2012-06-13