Paper Publications
The study of humidity effect on self-heated surface micromachined polysilicon resistor
- Affiliation of Author(s):化工学院
- Funded by:主管部门科技项目
- First Author:mahongyu
- Co-author:张卫东,dingenjie
- Indexed by:Journal paper
- Document Code:paper_43528
- Volume:483;;
- ISSN No.:10139826
- Translation or Not:no
- Date of Publication:2011-08-25