The study on methane sensing with high-temperature low-power CMOS compatible silicon microheater

• Affiliation of Author(s):化工学院
• Funded by:省、市、自治区科技项目
• First Author:mahongyu
• Co-author:秦顺利,王丽影,wanggang,zhaoxiaohu,dingenjie
• Indexed by:Journal paper
• Document Code:paper_101564
• Volume:244;-;
• ISSN No.:0925-4005
• Translation or Not:no
• Date of Publication:2017-06-12