Simulation and fabrication of nanostructures with laser interference lithography

Release time:2021-09-29 Hits:

Affiliation of Author(s):机电工程学院

Funded by:国家自然科学基金项目

First Author:yanghaifeng

Co-author:贺海东,赵恩兰,Jing Han,Jingbin Hao,钱济国,tangwei,朱华

Indexed by:Journal paper

Document Code:paper_94412

Volume:24;6;

ISSN No.:1054-660X

Translation or Not:no

Date of Publication:2014-04-01