Tribological Properties of a Textured Silicon Surface Induced by Laser Interference Lithography

Release time:2021-09-28 Hits:

Affiliation of Author(s):机电工程学院

Funded by:其他课题

First Author:yanghaifeng

Co-author:满家祥,贺海东,dinghaigang,Hao Liu,zhaojiyun

Indexed by:Journal paper

Document Code:paper_105732

Volume:39;3-6;195-207

ISSN No.:0898-1507

Translation or Not:no

Date of Publication:2018-03-15