Language : English
李玉鹏
Home
Scientific Research
Research Field
Paper Publications
Patents
Published Books
Research Projects
Teaching Research
Teaching Resources
Teaching Information
Teaching Achievement
Awards and Honours
Enrollment Information
Student Information
My Album
Blog
Recommended MA Supervisor
MOBILE Version

Paper Publications

Current position: Home  >  Scientific Research  >  Paper Publications

基于正交试验的PECVD法沉积氮化硅薄膜工艺参数优化研究

Hits:

Affiliation of Author(s):矿业工程学院

Journal:人工晶体学报

Funded by:国家自然科学基金项目

First Author:吴晓松

Co-author:褚学宁,李玉鹏

Indexed by:Journal paper

Document Type:J

Volume:43

Issue:8

Page Number:1913-1920

Translation or Not:no

Date of Publication:2014-08-16