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Paper Publications

Current position: Home  >  Scientific Research  >  Paper Publications

基于数字模拟的PECVD沉积氮化硅薄膜的 工艺参数决策方法研究

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DOI number:10.13922/j.cnki.cjovst.2015.03.06

Journal:真空科学与技术学报

First Author:吴晓松

Co-author:褚学宁,李玉鹏,

Indexed by:Journal paper

Document Type:J

Volume:35

Issue:3

Page Number:1-10

Translation or Not:no

Date of Publication:2015-03-12