Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films
- Journal:Appl. Phys. Lett.
- First Author:Shipeng Xu
- Co-author: Peiling Ke, Meidong Huang,Xiaowei Li
- Correspondence Author:Aiying Wang*
- Volume:104
- Issue:14
- Page Number:141908
- Translation or Not:no
- Date of Publication:2014-04-07