Ti/Al co-doping induced residual stress reduction and bond structure evolution of amorphous carbon films: An experimental and ab initio study
- Journal:Carbon
- First Author:Xiaowei Li
- Co-author: Peiling Ke, Dong Zhang, Xiao Zuo, Lili Sun,Peng Guo
- Correspondence Author: Aiying Wang*,Xiaowei Li
- Volume:111
- Page Number:467-475
- Translation or Not:no
- Date of Publication:2017-01-01
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