Microstructure and mechanical properties of Ti/Al co-doped DLC films: dependence on sputtering current, source gas, and substrate bias
- Journal:Appl. Surf. Sci.
- First Author: Cuicui Kong#,Ting Guo#
- Co-author: Zhenyu Wang,Peng Guo
- Correspondence Author: Aiying Wang*,Xiaowei Li
- Volume:410
- Page Number:51-59
- Translation or Not:no
- Date of Publication:2017-07-15