多元金属掺杂类金刚石薄膜设计制备与应力降低协同机制
- Leading Scientist:李晓伟
- Project level:National
- Date of Project Approval:2015-01-01
- Scheduled completion time:2017-12-31
- Date of Project Completion:2017-12-31
- Date of Project Initiation:2015-01-01
- Project Approval Number:51402319
- Subsidy Amount:25.0
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