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Home > Scientific Research > Paper Publications

Stress reduction dependent on incident angles of carbon ions in ultrathin tetrahedral amorphous carbon films

Release time:2021-09-28 Hits:

Affiliation of Author(s):电气工程学院
 First Author:liuxiaowen
 Indexed by:Journal paper
 Document Code:paper_48336
 Translation or Not:no
 Date of Publication:2002-01-01

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