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含遮蔽抛射沉积模型的有限尺寸效应
Release time:2021-09-29  Hits:

Affiliation of Author(s):材料与物理学院
Funded by:国家自然科学基金项目
First Author:haodapeng
Co-author:tanggang,xiahui,hankui,xunzhipeng
Indexed by:Journal paper
Document Code:paper_87144
Volume:60;3;038102(1-7)
ISSN No.:1000-3290
Translation or Not:no
CN No.:11-1958/04
Date of Publication:2011-03-01