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类金刚石薄膜的残余应力调控研究进展

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DOI number::10. 11933 / j. issn. 1007-9289. 20220629002

Affiliation of Author(s):材料与物理学院

Funded by:国家自然科学基金项目

First Author:杜乃洲

Co-author:付志民,fengcunao,guopeng,Xiaowei Li

Indexed by:Journal paper

Document Code:5b5bb2949172839501919c9449f27978

Volume::,15

Translation or Not:no

Date of Publication:2024-08-12