中国矿业大学主页平台系统 Lingxiu Chen--Home Page-- Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles

Lingxiu Chen

Lingxiu Chen, Associate professor. Received bachelor's degree from China University of Mining and Technology, and received PhD degree from Shanghai Institute of Microsystems and Information Technology, Chinese Academy of Sciences. Supported by Shanghai Super Postdoctoral Program and China Postdoctoral Science Fundation. During this period, published important results in Nat. Mater., Nat. Co...Detials

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Directional etching for high aspect ratio nano-trenches on hexagonal boron nitride by catalytic metal particles

Release time:2023-08-25 Hits:

DOI number:10.1088/2053-1583/ac5461
Affiliation of Author(s):材料与物理学院
Funded by:自选课题
First Author:Chen, Chen
Co-author:He, Li,Jiang, Chengxin,Lingxiu Chen,Wang, Hui Shan,Wang, XIujun,Kong, Ziqiang,Mu, Xiaojing,Wei, Zhipeng,Watanabe, Kenji,Taniguchi, Takashi,Wu, Tianru,Zhang, Daoli,Wang, Haomin
Indexed by:Journal paper
Volume:卷: 9期: 2
ISSN No.:2053-1583
Translation or Not:no
Date of Publication:2022-04-01

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