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氮离子注入硅表面的力学性能及其微摩擦磨损行为研究
- Release time:2024-10-15
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DOI number:
10.1080/09640568.2023.2168524Affiliation of Author(s):
经济管理学院Funded by:
国家自然科学基金项目First Author:
Feiyu ChenCo-author:
Jiang, Shiyan,Gu, Xiao,Zhiwei, Wang,Yang, LifengIndexed by:
Journal paperDocument Code:
5b5bb2948f655d41018f66b369910670Volume:
卷: 67期: 6页: 1367-1385ISSN No.:
0964-0568Translation or Not:
noDate of Publication:
2024-05-11
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